PTE-141

Product Description

Customized

Model	PTE-121	PTE-131	PTE-141
Load Number of ports	2	3	4
Handling object	300mm wafer: diameter 300±0.2 mm,thickness 775μm
Compatible carriers	25-slot 300mm FOUP(SEMI E47.1)
	25-slot 300mm FOSB(SEMI M31)
Power supply	Single-phase AC220V±10%,50/60Hz±5%,4KVA(lncluding FFU)
Vacuum	-80kPa~-90kPa
	40L/min	50L/min	60L/min
Compressed air	0.6MPa~0.7MPa
	20L/min	30L/min	40L/min

High-speed Performance

AI Vision Integration

High Precision and Repeatability

Easy System Integration

Flexible Payload Options

Reliable Operation For 24/7 Production