The RW-A000H is a high-payload wafer-handling robot designed for reliable and precise semiconductor automation. Featuring a low-voltage servo arm, a payload capacity of up to 10 kg, and Class 1 cleanliness at 0.1 μm, it supports demanding cleanroom applications while offering flexible top- or bottom-mounting and AC 220 V operation.
| Drive method | R/Z/T axis | Low-voltage servo | |
| Travel | R axis | Arm length:190/260 mm | |
| Z axis | 300/450/500mm | ||
| T axis | 0-340° | ||
| Maximum speed | R axis | 700mm/s | |
| Z axis | 500mm/s | ||
| T axis | 130°/s | ||
| Repetitive positioning accuracy | R/Z axis | ±0.1mm | |
| Z axis | ±0.02° | ||
| Cleanliness class | [email protected]μm | ||
| Noise | ≤80dB | ||
| Power supply | Single phase AC 220V,50/60Hz | ||
| Cable length | 3m(standard) | ||
| Air supply | CDA | Φ6quick fitting,0.4～0.6MPa,10NL/min | |
| Vacuum | -50~-70kPa | ||
| Handling vibration value | <0.5g | ||
| I/O interface | 8IN;8OUT | ||
| Mounting type | Top/Bottom mounting | ||
| Payload | ≤10kg(including end-effector) | ||
| End-effector | Heavy-load fork (customizable) | ||
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